About us

We are a team of around 30 people with many years of experience in the field of micro- and nanostructuring and microanalysis. As a technology group, we embody the Competence Centre for Micro- and Nanotechnologies (CMNT) of the Leibniz IPHT in Jena.

We produce chip- and wafer-based micro- and nanoscale functional elements for the institute’s research content on the basis of top-down thin-film processes. We have an excellently equipped 700m² ISO class 4 clean room at our disposal for this purpose.

In addition to the research activities for the institute, we also offer solutions for special customer-specific issues.

• Our infrared thermosensors are used in medical technology and in space.
• True wafer-scale nanolithography is the basis for the production of NIL masters and resolution objects for high-resolution optical microscopy up to the UV range.
• Our patented atomic layer deposition process enables black layers with absorption over an extremely wide frequency range.
• We have ion-optical, electron-optical, tactile and X-ray-based methods at our disposal for analysing materials and microstructures on customer samples.