From micro to nano …
As a competence center for micro- and nanotechnologies (KMNT) at the Leibniz Institute of Photonic Technology in Jena (Leibniz IPHT), we are specialized in the production of infrared thermal sensors, have the capability of nanostructuring at wafer level and offer a wide range of special microfabricated products and services in the field of planar microstructure technology and a broad spectrum of solid-state analytical methods for interested parties and external customers. We have a broad spectrum of wafer-scale electron beam lithography and photolithography-based MEMS technologies at our disposal, enabling us to process a wide range of different thin-film materials – including those that are not used in conventional semiconductor production.
Products and Services
IR radiation detectors
Infrared thermal sensors with a wide range of applications from medical technology to space missions
Microscopy accessories
Finder grids for easy retrieval of individual particles,
Resolution objects for high-resolution optical microscopy up to the UV range
Services
Material and microstructure analysis for customer samples
Absorber layers based on our patented 3D ALD process,
NIL master with large-area nanostructures
Our highly qualified team of scientists, engineers and laboratory technicians supports you in the development and manufacture of customized sensors for a wide range of thermal sensor applications. From concept development to series production – we support you at every step of the process and ensure that your sensor solutions meet the highest standards.
Our clean room laboratories and modern production facilities enable the production of micro and nano sensors with the highest precision and quality. We rely on the latest technologies and innovative processes, such as lithographic processes, etching techniques and thin film deposition, to create customized sensor solutions for our customers and research partners.
Areas of application for IR radiation detectors
IR sensors for respiratory gas analysis, anesthetic gas analysis and industrial gas detection
IR sensors for metal, glass, ceramic and chemical production, early fire detection, thermal inspections and space exploration
As part of an extensive network of companies, research institutes and universities, we are well connected and always at the cutting edge of technology. Benefit from our many years of experience and our comprehensive expertise in sensor production to successfully implement your innovation projects.
Discover the potential of micro and nanotechnologies for your sensor solutions at the Competence Center for Micro and Nanotechnologies in Jena. Contact us today and let’s work together on your sensor innovations!
Our competence team
Dr. Uwe Hübner
Your contact for microscopy accessories and customer-specific inquiries
Head of the Competence Center for Micro- and Nanotechnologies
