Finder Grid - Silicon 10x10mm²
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Finder Grid – Silicon 10x10mm²

Numbered, two-dimensional marker array for locating positions on the chip

  • Silicon chip with gold marker array (marker spacing 500 µm).
  • The markers enable aligmnement for exposures in several layout planes, e.g. for the electrical connection of deposited 2D materials.
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Description

Numbered, two-dimensional marker array for localizing and finding positions on the chip. Enables multilayer exposures, e.g. for the electrical connection of 2D materials deposited on the chip surface.

  • Substrate for electron beam lithography (EBL)
  • Substrate for ion beam lithography (FIB)
  • AFM

Structures:

  • Marker spacing: 500 µm in x and y

Chip:

  • Size: 10 x 10 x 0.5 mm³
  • Substrate material: Silicon or oxidised silicon
  • Structure material: 50 nm gold

Offer | Contact

Huebner

Dr. Uwe Hübner
Head of the Competence Centre for Micro- and Nanotechnologies
Your contact for customised enquiries

Phone: +49 (0) 3641 · 206-126
Email: uwe.huebner@leibniz-ipht.de

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