ZS-64.2 Infrared sensor array

Field of application:

Spectral gas detection (NDIR spectroscopy with 64 pixels)

Features:

High detectivity
Excellent long-term stability
High spectral sensitivity
Absorbance properties can be customised to the application
No cooling, bias voltage or current required for operation

Delivery quantities: on request

Description

The ZS-64.2 is a MEMS-based microchip with 64 pixels of 30 thermocouple pairs each. The 64 receiver areas have a size of 0.45mm x 1.5mm and are arranged on a line with a period of 0.5mm. The micro-structured antimony and bismuth thin films ensure excellent detectivity. The sensor substrate is made of silicon. Thanks to a special coating, the sensor achieves very high and broadband absorption in the infrared spectral range. The crosstalk between neighbouring pixels is minimised by slits in the membrane. The microchip is supplied on blue tape in wafer format.