FIB/REM preparation and structuring

We offer a wide range of methods for sample preparation and surface structuring – Surface structuring using ion fine beam (FIB; Ga+) – Surface polishing using ions (Ar+) – Preparation of cross sections (Ga-FIB and Ar-Cross Section Polisher) – High vacuum evaporation (carbon, various metals) – Sputtering (various metals)

Categories: ,

Description

  • Fine ion beam (FIB)
    • FEI Helios Nanolab G3 UC (Ga+, 30keV, 50nA)
    • Tescan Lyra XMU (Ga+, 30keV, 10nA)
  • Ion beam etching
    • JEOL IB-9010CP (Ar+; 6keV; 150 µA)
  • High vacuum evaporation
    • Leica ACE600 with C-filament
  • Sputter Coater
    • BalTec Med20 (Cr, Ta, Pt, Au)

Offer | Contact

Dellith

Dr. Jan Dellith
Your contact for material and microstructure analysis

Phone: +49 (0) 3641 · 206-104
Email: jan.dellith@leibniz-ipht.de