Structure analysis
Structure analysis - Image 2

Structure analysis

Structure analysis with X-ray diffraction (XRD) and X-ray reflectometry (XRR)XRD is used to identify and quantify crystalline phases on solids (bulk, powder or thin film) and to determine crystallite sizes. Epitaxial properties are determined on thin films using texture measurements and Reciprocal Space Maps (RSM) XRR is used to measure film thicknesses up to 300 nm and to determine the roughness of substrates and films.

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Description

X-ray diffractometer Panalytical X`Pert Pro, features: theta-theta diffractometer with horizontal sample position copper X-ray tube optics input beam:

  • Programmable divergence slit,
  • Parallel mirror,
  • focussing mirror,
  • hybrid monochromator (pure calpha1 radiation),
  • Fixed Collimator Point Source

Diffracted beam optics :

  • Programmable anti-scatter slot,
  • fixed anti-scatter slot,
  • Parallel Plate Collimator

Semiconductor detectors :

  • PIXCEL1D line detector,
  • PIXCEL3D area detector

Sample stages:

  • IR stage suitable for 4-inch wafers, height-adjustable by 7.5 cm,
  • Reflection transmission spinner with 15x interchangeable magazine,
  • open 4-axis Eulerian cradle (Phi, PSI, X and Y axes),
  • capillary spinner,
  • fixed stage

Offer | Contact

Dellith

Dr. Jan Dellith
Your contact for material and microstructure analysis

Phone: +49 (0) 3641 · 206-104
Email: jan.dellith@leibniz-ipht.de

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